Methods of forming microelectronic devices, and related microelectronic devices, memory devices, and electronic systems

ABSTRACT

A microelectronic device includes a stack structure, a staircase structure, conductive pad structures, and conductive contact structures. The stack structure includes vertically alternating conductive structures and insulating structures arranged in tiers. Each of the tiers individually includes one of the conductive structures and one of the insulating structures. The staircase structure has steps made up of edges of at least some of the tiers of the stack structure. The conductive pad structures are on the steps of the staircase structure and include beta phase tungsten. The conductive contact structures are on the conductive pad structures. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.

TECHNICAL FIELD

The disclosure, in various embodiments, relates generally to the fieldof microelectronic device design and fabrication. More specifically, thedisclosure relates to methods of forming microelectronic devices, and torelated microelectronic devices, memory devices, and electronic systems.

BACKGROUND

A continuing goal of the microelectronics industry has been to increasethe memory density (e.g., the number of memory cells per memory die) ofmemory devices, such as non-volatile memory devices (e.g., NAND Flashmemory devices). One way of increasing memory density in non-volatilememory devices is to utilize vertical memory array (also referred to asa “three-dimensional (3D) memory array”) architectures. A conventionalvertical memory array includes vertical memory strings extending throughopenings in one or more stack structures including tiers of conductivestructures and dielectric materials. Each vertical memory string mayinclude at least one select device coupled in series to a serialcombination of vertically-stacked memory cells. Such a configurationpermits a greater number of switching devices (e.g., transistors) to belocated in a unit of die area (i.e., length and width of active surfaceconsumed) by building the array upwards (e.g., vertically) on a die, ascompared to structures with conventional planar (e.g., two-dimensional)arrangements of transistors.

Vertical memory array architectures generally include electricalconnections between the conductive structures of the tiers of the stackstructure(s) of the memory device and access lines (e.g., word lines) sothat the memory cells of the vertical memory array can be uniquelyselected for writing, reading, or erasing operations. One method offorming such an electrical connection includes forming so-called“staircase” (or “stair step”) structures at edges (e.g., horizontalends) of the tiers of the stack structure(s) of the memory device. Thestaircase structure includes individual “steps” defining contact regionsof the conductive structures, upon which conductive contact structurescan be positioned to provide electrical access to the conductivestructures.

Unfortunately, as feature packing densities have increased and marginsfor formation errors have decreased, conventional methods of formingmemory devices (e.g., NAND Flash memory devices) have resulted inundesirable damage that can diminish desired memory device performance,reliability, and durability. For example, conventional processes offorming conductive contact structures on the steps of a staircasestructure within a stack structure may punch through conductivestructures of the stack structure, resulting in undesirable currentleaks and short circuits. Conventional methods of mitigating such punchthrough include forming dielectric pad structures (e.g., so called “mesanitride” structures) on sacrificial insulative structures (e.g.,dielectric nitride structures) at steps of a staircase structure withina preliminary stack structure prior to subjecting the preliminary stackstructure to so called “replacement gate” or “gate last” processing toreplace one or more portions of the sacrificial insulative structureswith conductive structures and form the stack structure. During thereplacement gate processing the dielectric pad structures are alsoreplaced with conductive material to effectively increase thicknesses ofportions of the conductive structures at the steps of the staircasestructure and mitigate the aforementioned punch through during thesubsequent formation of the conductive contact structures. However, theconfigurations of some staircase structures (e.g., symmetric staircasestructures) within a preliminary stack structure may result inincomplete replacement of the dielectric pad structures with conductivematerial during replacement gate processing and effectuate undesirabledefects (e.g., material inconsistencies, voiding) at the steps of thestaircase structure.

Accordingly, there remains a need for new microelectronic device (e.g.,memory device, such as 3D NAND Flash memory device) configurationsfacilitating enhanced memory density while alleviating the problems ofconventional microelectronic device configurations, as well as for newmethods of forming the microelectronic devices and new electronicsystems including the new microelectronic device configurations.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A through 1K are partial cross-sectional views illustrating amethod of forming a microelectronic device, in accordance withembodiments of the disclosure.

FIGS. 2A through 2C are partial cross-sectional views illustrating amethod of forming a microelectronic device, in accordance withadditional embodiments of the disclosure.

FIG. 3 is a partial cutaway perspective view of a microelectronicdevice, in accordance with embodiments of the disclosure.

FIG. 4 is a schematic block diagram illustrating an electronic system,in accordance with embodiments of the disclosure.

DETAILED DESCRIPTION

The following description provides specific details, such as materialcompositions, shapes, and sizes, in order to provide a thoroughdescription of embodiments of the disclosure. However, a person ofordinary skill in the art would understand that the embodiments of thedisclosure may be practiced without employing these specific details.Indeed, the embodiments of the disclosure may be practiced inconjunction with conventional microelectronic device fabricationtechniques employed in the industry. In addition, the descriptionprovided below does not form a complete process flow for manufacturing amicroelectronic device (e.g., a memory device, such as 3D NAND Flashmemory device). The structures described below do not form a completemicroelectronic device. Only those process acts and structures necessaryto understand the embodiments of the disclosure are described in detailbelow. Additional acts to form a complete microelectronic device fromthe structures may be performed by conventional fabrication techniques.

Drawings presented herein are for illustrative purposes only, and arenot meant to be actual views of any particular material, component,structure, device, or system. Variations from the shapes depicted in thedrawings as a result, for example, of manufacturing techniques and/ortolerances, are to be expected. Thus, embodiments described herein arenot to be construed as being limited to the particular shapes or regionsas illustrated, but include deviations in shapes that result, forexample, from manufacturing. For example, a region illustrated ordescribed as box-shaped may have rough and/or nonlinear features, and aregion illustrated or described as round may include some rough and/orlinear features. Moreover, sharp angles that are illustrated may berounded, and vice versa. Thus, the regions illustrated in the figuresare schematic in nature, and their shapes are not intended to illustratethe precise shape of a region and do not limit the scope of the presentclaims. The drawings are not necessarily to scale. Additionally,elements common between figures may retain the same numericaldesignation.

As used herein, a “memory device” means and includes a microelectronicdevice exhibiting, but not limited to, memory functionality.

As used herein, the terms “vertical,” “longitudinal,” “horizontal,” and“lateral” are in reference to a major plane of a structure and are notnecessarily defined by earth's gravitational field. A “horizontal” or“lateral” direction is a direction that is substantially parallel to themajor plane of the structure, while a “vertical” or “longitudinal”direction is a direction that is substantially perpendicular to themajor plane of the structure. The major plane of the structure isdefined by a surface of the structure having a relatively large areacompared to other surfaces of the structure.

As used herein, features (e.g., regions, structures, devices) describedas “neighboring” one another means and includes features of thedisclosed identity (or identities) that are located most proximate(e.g., closest to) one another. Additional features (e.g., additionalregions, additional structures, additional devices) not matching thedisclosed identity (or identities) of the “neighboring” features may bedisposed between the “neighboring” features. Put another way, the“neighboring” features may be positioned directly adjacent one another,such that no other feature intervenes between the “neighboring”features; or the “neighboring” features may be positioned indirectlyadjacent one another, such that at least one feature having an identityother than that associated with at least one the “neighboring” featuresis positioned between the “neighboring” features. Accordingly, featuresdescribed as “vertically neighboring” one another means and includesfeatures of the disclosed identity (or identities) that are located mostvertically proximate (e.g., vertically closest to) one another.Moreover, features described as “horizontally neighboring” one anothermeans and includes features of the disclosed identity (or identities)that are located most horizontally proximate (e.g., horizontally closestto) one another.

As used herein, the terms “comprising,” “including,” “having,” andgrammatical equivalents thereof are inclusive or open-ended terms thatdo not exclude additional, unrecited elements or method steps, but alsoinclude the more restrictive terms “consisting of” and “consistingessentially of” and grammatical equivalents thereof. As used herein, theterm “may” with respect to a material, structure, feature, or method actindicates that such is contemplated for use in implementation of anembodiment of the disclosure and such term is used in preference to themore restrictive term “is” so as to avoid any implication that other,compatible materials, structures, features, and methods usable incombination therewith should or must be excluded.

As used herein, spatially relative terms, such as “beneath,” “below,”“lower,” “bottom,” “above,” “upper,” “top,” “front,” “rear,” “left,”“right,” and the like, may be used for ease of description to describeone element's or feature's relationship to another element(s) orfeature(s) as illustrated in the figures. Unless otherwise specified,the spatially relative terms are intended to encompass differentorientations of the materials in addition to the orientation depicted inthe figures. For example, if materials in the figures are inverted,elements described as “below” or “beneath” or “under” or “on bottom of”other elements or features would then be oriented “above” or “on top of”the other elements or features. Thus, the term “below” can encompassboth an orientation of above and below, depending on the context inwhich the term is used, which will be evident to one of ordinary skillin the art. The materials may be otherwise oriented (e.g., rotated 90degrees, inverted, flipped) and the spatially relative descriptors usedherein interpreted accordingly.

As used herein, the singular forms “a,” “an,” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise.

As used herein, “and/or” includes any and all combinations of one ormore of the associated listed items.

As used herein, the term “configured” refers to a size, shape, materialcomposition, orientation, and arrangement of one or more of at least onestructure and at least one apparatus facilitating operation of one ormore of the structure and the apparatus in a pre-determined way.

As used herein, the term “substantially” in reference to a givenparameter, property, or condition means and includes to a degree thatone of ordinary skill in the art would understand that the givenparameter, property, or condition is met with a degree of variance, suchas within acceptable tolerances. By way of example, depending on theparticular parameter, property, or condition that is substantially met,the parameter, property, or condition may be at least 90.0 percent met,at least 95.0 percent met, at least 99.0 percent met, at least 99.9percent met, or even 100.0 percent met.

As used herein, “about” or “approximately” in reference to a numericalvalue for a particular parameter is inclusive of the numerical value anda degree of variance from the numerical value that one of ordinary skillin the art would understand is within acceptable tolerances for theparticular parameter. For example, “about” or “approximately” inreference to a numerical value may include additional numerical valueswithin a range of from 90.0 percent to 110.0 percent of the numericalvalue, such as within a range of from 95.0 percent to 105.0 percent ofthe numerical value, within a range of from 97.5 percent to 102.5percent of the numerical value, within a range of from 99.0 percent to101.0 percent of the numerical value, within a range of from 99.5percent to 100.5 percent of the numerical value, or within a range offrom 99.9 percent to 100.1 percent of the numerical value.

Unless the context indicates otherwise, the materials described hereinmay be formed by any suitable process including, but not limited to,spin coating, blanket coating, chemical vapor deposition (“CVD”), atomiclayer deposition (“ALD”), plasma enhanced ALD, physical vapor deposition(“PVD”) (including sputtering, evaporation, ionized PVD, and/orplasma-enhanced CVD), or epitaxial growth. Depending on the specificmaterial to be formed, the technique for depositing or growing thematerial may be selected by a person of ordinary skill in the art. Inaddition, unless the context indicates otherwise, the removal ofmaterials described herein may be accomplished by any suitable processincluding, but not limited to, etching (e.g., dry etching, wet etching,vapor etching), ion milling, abrasive planarization, or other knownmethods.

FIGS. 1A through 1K are simplified partial cross-sectional viewsillustrating embodiments of a method of forming a microelectronic device(e.g., a memory device, such as a 3D NAND Flash memory device). Themicroelectronic devices formed through the methods of the disclosure mayinclude staircase structures including beta (β) phase tungstenstructures located at steps thereof. With the description providedbelow, it will be readily apparent to one of ordinary skill in the artthat the methods and structures described herein may be used in variousdevices and electronic systems.

Referring to FIG. 1A, a microelectronic device structure 100 may beformed to include a preliminary stack structure 102. The preliminarystack structure 102 includes a vertically alternating (e.g., in theZ-direction) sequence of insulative structures 104 and additionalinsulative structures 106 arranged in tiers 108. Each of the tiers 108of the preliminary stack structure 102 may include at least one of theinsulative structures 104 vertically neighboring at least one of theadditional insulative structures 106. The preliminary stack structure102 may be formed to include any desired number of the tiers 108, suchas greater than or equal to sixteen (16) tiers 108, greater than orequal to thirty-two (32) tiers 108, greater than or equal to sixty-four(64) tiers 108, or greater than or equal to one hundred twenty-eight(128) tiers 108.

The insulative structures 104 may be formed of and include at least oneelectrically insulative material, such one or more of at least onedielectric oxide material (e.g., one or more of a silicon oxide(SiO_(x)), phosphosilicate glass, borosilicate glass,borophosphosilicate glass, fluorosilicate glass, an aluminum oxide(AlO_(x)), a hafnium oxide (HfO_(x)), a niobium oxide (NbO_(x)), atitanium oxide (TiO_(x)), a zirconium oxide (ZrO_(x)), a tantalum oxide(TaO_(x)), and a magnesium oxide (MgO_(x))), at least one dielectricnitride material (e.g., a silicon nitride (SiN_(y))), at least onedielectric oxynitride material (e.g., a silicon oxynitride(SiO_(x)N_(y))), and at least one dielectric carboxynitride material(e.g., a silicon carboxynitride (SiO_(x)C_(z)N_(y))). Formulae includingone or more of “x”, “y”, and “z” herein (e.g., SiO_(x), AlO_(x),HfO_(x), NbO_(x), TiO_(x), SiN_(y), SiO_(x)N_(y), SiO_(x)C_(z)N_(y))represent a material that contains an average ratio of “x” atoms of oneelement, “y” atoms of another element, and “z” atoms of an additionalelement (if any) for every one atom of another element (e.g., Si, Al,Hf, Nb, Ti). As the formulae are representative of relative atomicratios and not strict chemical structure, the insulative structures 104may comprise one or more stoichiometric compounds and/or one or morenon-stoichiometric compounds, and values of “x”, “y”, and “z” (if any)may be integers or may be non-integers. As used herein, the term“non-stoichiometric compound” means and includes a chemical compoundwith an elemental composition that cannot be represented by a ratio ofwell-defined natural numbers and is in violation of the law of definiteproportions. Each of the insulative structures 104 may individuallyinclude a substantially homogeneous distribution or a substantiallyheterogeneous distribution of the at least one electrically insulativematerial. As used herein, the term “homogeneous distribution” meansamounts of a material do not vary throughout different portions (e.g.,different horizontal portions, different vertical portions) of astructure. Conversely, as used herein, the term “heterogeneousdistribution” means amounts of a material vary throughout differentportions of a structure. In some embodiments, each of the insulativestructures 104 exhibits a substantially homogeneous distribution ofelectrically insulative material. In further embodiments, at least oneof the insulative structures 104 exhibits a substantially heterogeneousdistribution of at least one electrically insulative material. One ormore of the insulative structures 104 may, for example, be formed of andinclude a stack (e.g., laminate) of at least two different electricallyinsulative materials (e.g., at least two different dielectricmaterials). In some embodiments, each of the insulative structures 104is formed of and includes silicon dioxide (SiO₂). The insulativestructures 104 may each be substantially planar, and may eachindividually exhibit a desired thickness. In addition, each of theinsulative structures 104 may be substantially the same (e.g., exhibitsubstantially the same material composition, material distribution,size, and shape) as one another, or at least one of the insulativestructures 104 may be different (e.g., exhibit one or more of adifferent material composition, a different material distribution, adifferent size, and a different shape) than at least one other of theinsulative structures 104. In some embodiments, each of the insulativestructures 104 is substantially the same as each other of the insulativestructures 104.

The additional insulative structures 106 of the tiers 108 of thepreliminary stack structure 102 may be formed of and include at leastone additional electrically insulative material. Material compositionsof the additional insulative structures 106 and the insulativestructures 104 may be selected such that the insulative structures 104and the additional insulative structures 106 may be selectively removedrelative to one another. The additional insulative structures 106 may beselectively etchable relative to the insulative structures 104 duringcommon (e.g., collective, mutual) exposure to a first etchant, and theinsulative structures 104 may be selectively etchable to the additionalinsulative structures 106 during common exposure to a second, differentetchant. As used herein, a material is “selectively etchable” relativeto another material if the material exhibits an etch rate that is atleast about five times (5×) greater than the etch rate of anothermaterial, such as about ten times (10×) greater, about twenty times(20×) greater, or about forty times (40×) greater. A materialcomposition of the additional insulative structures 106 is differentthan a material composition of the insulative structures 104. Theadditional insulative structures 106 may comprise an additionalelectrically insulative material, such as one or more of at least onedielectric oxide material (e.g., one or more of SiO_(x), phosphosilicateglass, borosilicate glass, borophosphosilicate glass, fluorosilicateglass, AlO_(x), HfO_(x), NbO_(x), TiO_(x), ZrO_(x), TaO_(x), andMgO_(x)), at least one dielectric nitride material (e.g., SiN_(y)), atleast one dielectric oxynitride material (e.g., SiO_(x)N_(y)), and atleast one dielectric carboxynitride material (e.g., SiO_(x)C_(z)N_(y)).In some embodiments, the additional insulative structures 106 are formedof and include a dielectric nitride material, such as SiN_(y) (e.g.,Si₃N₄). Each of the additional insulative structures 106 mayindividually include a substantially homogeneous distribution of the atleast one additional electrically insulative material, or asubstantially heterogeneous distribution of the at least one additionalelectrically insulative material. In some embodiments, each of theadditional insulative structures 106 of the preliminary stack structure102 exhibits a substantially homogeneous distribution of additionalelectrically insulative material. In additional embodiments, at leastone of the additional insulative structures 106 of the preliminary stackstructure 102 exhibits a substantially heterogeneous distribution of atleast one additional electrically insulative material. The additionalinsulative structure(s) 106 may, for example, individually be formed ofand include a stack (e.g., laminate) of at least two differentadditional electrically insulative materials. The additional insulativestructures 106 may each be substantially planar, and may eachindividually exhibit a desired thickness.

With continued reference to FIG. 1A, the microelectronic devicestructure 100 may further include at least one staircase structure 110including steps 112 (e.g., contact regions) defined by edges (e.g.,horizontal ends) of the tiers 108. The staircase structure 110 mayinclude a desired quantity of the steps 112. As shown in FIG. 1A, insome embodiments, the steps 112 of the staircase structure 110 arearranged in order, such that steps 112 horizontally neighboring oneanother in the X-direction correspond to tiers 108 of the preliminarystack structure 102 vertically neighboring one another in theZ-direction. In additional embodiments, the steps 112 of the staircasestructure 110 are arranged out of order, such that at least some steps112 of the staircase structure 110 horizontally neighboring one anotherin the X-direction correspond to tiers 108 of preliminary stackstructure 102 not vertically neighboring one another in the Z-direction.

The preliminary stack structure 102 may include a desired quantity anddistribution (e.g., spacing and arrangement) of staircase structures110. The preliminary stack structure 102 may include a single (e.g.,only one) staircase structure 110, or may include multiple (e.g., morethan one) staircase structures 110. If the preliminary stack structure102 includes multiple staircase structures 110, each of the staircasestructures 110 may be positioned at a different vertical location (e.g.,in the Z-direction) within the preliminary stack structure 102, or atleast one of the staircase structures 110 may be positioned atsubstantially the same vertical location (e.g., in the Z-direction)within the preliminary stack structure 102 as at least one other of thestaircase structures 110. If multiple staircase structures 110 arepositioned at substantially the same vertical location (e.g., in theZ-direction) within the preliminary stack structure 102, the staircasestructures 110 may be horizontally positioned in series with oneanother, in parallel with one another, or a combination thereof. Ifmultiple staircase structures 110 at substantially the same verticallocation (e.g., in the Z-direction) (if any) within the preliminarystack structure 102 are horizontally positioned in series with oneanother, each of the staircase structures 110 may exhibit a positiveslope, each of the staircase structures 110 may exhibit a negativeslope, or at least one of the staircase structures 110 may exhibit apositive slope and at least one other of the staircase structures 110may exhibit a negative slope. For example, the preliminary stackstructure 102 may include one or more stadium structures individuallycomprising a first staircase structure 110 having a positive slope, anda second staircase structure 110 horizontally neighboring and in serieswith the first staircase structure 110 and having a negative slope.

Referring next to FIG. 1B, optionally, a dielectric liner material 114may be formed on or over exposed surfaces of the preliminary stackstructure 102. As shown in FIG. 1B, the dielectric liner material 114may be formed on or over exposed surfaces (e.g., exposed horizontalsurfaces, exposed vertical surfaces) of the preliminary stack structure102 at least partially defining the staircase structure 110. Optionally,the dielectric liner material 114 may also be formed on or overadditional exposed surfaces (e.g., exposed horizontal surfaces, exposedvertical surfaces) of the preliminary stack structure 102 outside of theboundaries (e.g., horizontal boundaries, vertical boundaries) of thestaircase structure 110. The dielectric liner material 114 (if formed)may at least partially (e.g., substantially) conform to a topographydefined by the surfaces (e.g., horizontal surfaces, vertical surfaces)upon which the dielectric liner material 114 is formed. In additionalembodiments, the dielectric liner material 114 is not formed on or overexposed surfaces of the preliminary stack structure 102.

The dielectric liner material 114, if formed, may be formed of andinclude at least one dielectric material having different etchselectivity than the additional insulative structures 106 of thepreliminary stack structure 102. The dielectric liner material 114 may,for example, have an etch selectively substantially similar to that ofthe insulative structures 104 of preliminary stack structure 102.Portions of the dielectric liner material 114 may be employed to protect(e.g., mask) portions of the preliminary stack structure 102 duringsubsequent processing acts (e.g., subsequent material removal acts, suchas subsequent etching acts), as described in further detail below. Byway of non-limiting example, if formed, the dielectric liner material114 may be formed of and include at least one oxygen-containingdielectric material, such as a one or more of a dielectric oxidematerial (e.g., one or more of SiO_(x), phosphosilicate glass,borosilicate glass, borophosphosilicate glass, fluorosilicate glass,AlO_(x), HfO_(x), NbO_(x), and TiO_(x)), a dielectric oxynitridematerial (e.g., SiO_(x)N_(y)), and a dielectric carboxynitride material(e.g., SiO_(x)C_(z)N_(y)). A material composition of the dielectricliner material 114 may be substantially the same as or may be differentthan a material composition of the insulative structures 104 of thepreliminary stack structure 102. In some embodiments, the dielectricliner material 114 is formed of and includes SiO_(x) (e.g., SiO₂).

The dielectric liner material 114, if formed, may be formed to exhibit adesirable thickness less than the horizontal dimension (e.g., width) inthe X-direction of the individual steps 112 of the staircase structure110. The thickness of the dielectric liner material 114 may, forexample, be less than or equal to half of a width in the X-direction ofa horizontally smallest step 112 of the staircase structure 110. By wayof non-limiting example, the thickness of the dielectric liner material114 may be within a range of from about 10 Angstroms (Å) to about toabout 500 Å, such as within a range of from about 10 Å to about to about200 Å. In some embodiments, a thickness of the dielectric liner material114 is less than or equal to (e.g., substantially the same as) athickness of an individual insulative structure 104 of preliminary stackstructure 102.

The dielectric liner material 114 (if any) may be formed using one ormore conventional conformal deposition processes, such as one or more ofa conventional conformal CVD process and a conventional ALD process.

Referring next to FIG. 1C, portions of the insulative structures 104 ofthe preliminary stack structure 102 at the steps 112 of the staircasestructure 110 may be selectively removed to expose horizontal surfaces(e.g., upper surfaces) of the additional insulative structures 106 ofthe preliminary stack structure 102 at the steps 112 of the staircasestructure 110. As shown in FIG. 1C, if the dielectric liner material 114(FIG. 1C) was previously formed, horizontally extending portions of thedielectric liner material 114 (FIG. 1C) at the steps 112 of thestaircase structure 110 may also be removed while maintaining verticallyextending (e.g., in the Z-direction) portions of the dielectric linermaterial 114 (FIG. 1C) to form dielectric spacer structures 116 athorizontal ends (e.g., in the X-direction) of the steps 112 of thestaircase structure 110. The dielectric spacer structures 116 may coververtically extending surfaces (e.g., side surfaces) of the preliminarystack structure 102 at the steps 112 of the staircase structure 110,such as vertically extending surfaces (e.g., side surfaces) of theinsulative structures 104 and the additional insulative structures 106of the preliminary stack structure 102. If the dielectric liner material114 (FIG. 1C) was also formed outside of the boundaries (e.g.,horizontal boundaries, vertical boundaries) of the staircase structure110, some of the dielectric spacer structures 116 may be formed to coververtically extending surfaces of the preliminary stack structure 102outside of the boundaries (e.g., horizontal boundaries, verticalboundaries) of the staircase structure 110.

Portions of the insulative structures 104, and, optionally, thedielectric liner material 114 (FIG. 1C) (if any) at the steps 112 of thestaircase structure 110 may be selectively removed using conventionalmaterial removal processes (e.g., conventional etching processes) andconventional material removal equipment, which are not described indetail herein. For example, at least portions of the insulativestructures 104 and the dielectric liner material 114 (FIG. 1C) (if any)located within the boundaries (e.g., horizontal boundaries, verticalboundaries) of the staircase structure 110 may be subjected to aconventional anisotropic etching process (e.g., a conventionalanisotropic dry etching process) to expose the horizontal surfaces ofthe additional insulative structures 106 of the preliminary stackstructure 102 at the steps 112 of the staircase structure 110 and formthe dielectric spacer structures 116 (if the dielectric liner material114 (FIG. 1C) was previously formed).

Referring next to FIG. 1D, a semiconductive liner material 118 may beformed on or over exposed upper surfaces of the microelectronic devicestructure 100. The semiconductive liner material 118 may be formed tocover exposed horizontally extending surfaces and exposed verticallyextending surfaces of the microelectronic device structure 100 inside ofand outside of boundaries (e.g., horizontal boundaries, verticalboundaries) of the staircase structure 110. For example, as shown inFIG. 1D, the semiconductive liner material 118 may be formed on or overexposed surfaces of the additional insulative structures 106 and thedielectric spacer structures 116 (if any) within the boundaries of thestaircase structure 110, as well as on or over exposed surfaces of theinsulative structures 104, the additional insulative structures 106, andthe dielectric spacer structures 116 (if any) outside of the boundariesof the staircase structure 110. The semiconductive liner material 118may at least partially (e.g., substantially) conform to a topographydefined by the surfaces (e.g., horizontal surfaces, vertical surfaces)upon which the semiconductive liner material 118 is formed.

The semiconductive liner material 118 may be formed of and include of atleast one semiconductive material, such as one or more of a siliconmaterial, a silicon-germanium material, a boron material, a germaniummaterial, a gallium arsenide material, a gallium nitride material, andan indium phosphide material. By way of non-limiting example, thesemiconductive liner material 118 may be formed of and include at leastone silicon material. As used herein, the term “silicon material” meansand includes a material that includes elemental silicon or a compound ofsilicon. The semiconductive liner material 118 may, for example, beformed of and include one or more monocrystalline silicon andpolycrystalline silicon. In some embodiments, the semiconductive linermaterial 118 comprises polycrystalline silicon.

The semiconductive liner material 118 may be formed to exhibit adesirable thickness less than the horizontal dimension (e.g., width) inthe X-direction of the individual steps 112 of the staircase structure110. The thickness of the dielectric liner material 114 may, forexample, be less than or equal to a thickness of one of the tiers 108(including the combined thicknesses of the insulative structure 104 andthe additional insulative structure 106 thereof) of the preliminarystack structure 102. By way of non-limiting example, the thickness ofthe dielectric liner material 114 may be within a range of from about 20Angstroms (Å) to about to about 500 Å, such as within a range of fromabout 20 Å to about to about 400 Å, or from about 20 Å to about to about300 Å.

The semiconductive liner material 118 may be formed using one or moreconventional conformal deposition processes, such as one or more of aconventional conformal CVD process and a conventional ALD process.

Next, referring next to FIG. 1E, the semiconductive liner material 118(FIG. 1D) may be doped (e.g., impregnated) with one or more dopants(e.g., chemical species) to form a doped semiconductive liner material120. As shown in FIG. 1E, the doped semiconductive liner material 120may include horizontally extending portions 122 and vertically extendingportions 124. A maximum vertical depth (e.g., in the Z-direction) of thedopant(s) within the horizontally extending portions 122 of the dopedsemiconductive liner material 120 may be greater than a maximumhorizontal depth (e.g., in the X-direction) of the dopant(s) within thevertically extending portions 124 of the doped semiconductive linermaterial 120. Put another way, the dopant(s) may extend relativelydeeper into thicknesses (e.g., in the Z-direction) of the horizontallyextending portions 122 of the doped semiconductive liner material 120than into thicknesses (e.g., in the X-direction) of the verticallyextending portions 124 of the doped semiconductive liner material 120.In some embodiments, the dopant(s) are dispersed to or substantiallyproximate lower vertical boundaries (e.g., in the Z-direction) of thehorizontally extending portions 122 of the doped semiconductive linermaterial 120; and the dopant(s) are dispersed only partially through(e.g., less than completely through, such as less than or equal to about75 percent through, less than or equal to about 50 percent through, orless than or equal to about 25 percent through) the thicknesses (e.g.,in the X-direction) of the vertically extending portions 124 of thedoped semiconductive liner material 120. For example, as shown in FIG.1E, the vertically extending portions 124 of the doped semiconductiveliner material 120 may include doped regions 126, and substantiallyundoped regions 128 horizontally adjacent to (e.g., horizontallyunderlying in the X-direction) the doped regions 126.

The dopant(s) of the doped semiconductive liner material 120 maycomprise material(s) promoting or facilitating the subsequent formationof tungsten (e.g., β-phase tungsten) from the doped semiconductive linermaterial 120, as described in further detail below. In some embodiments,the dopant(s) comprise at least one N-type dopant, such as one or moreof phosphorus (P), arsenic (Ar), antimony (Sb), and bismuth (Bi). Inadditional embodiments, the dopant(s) comprise at least one P-typedopant, such as one or more of boron (B), aluminum (Al), and gallium(Ga). In further embodiments, the dopant(s) comprise one or more ofcarbon (C), fluorine (F), chlorine (Cl), bromine (Br), hydrogen (H),deuterium (²H), helium (He), neon (Ne), and argon (Ar).

The horizontally extending portions 122 of the doped semiconductiveliner material 120 may individually exhibit a substantially homogeneousdistribution of dopant(s) within the semiconductive material thereof, ormay individually exhibit a heterogeneous distribution of dopant(s)within the semiconductive material thereof. In some embodiments, each ofthe horizontally extending portions 122 of the doped semiconductiveliner material 120 exhibits a substantially homogeneous distribution ofdopant(s) within the semiconductive material thereof, such that thehorizontally extending portion 122 exhibits a substantially uniform(e.g., even, non-variable) distribution of the dopant(s) within thesemiconductive material thereof. For example, amounts (e.g., atomicconcentrations) of the dopant(s) included in each individualhorizontally extending portion 122 of the doped semiconductive linermaterial 120 may not substantially vary throughout the verticaldimensions (e.g., in the Z-direction) of the horizontally extendingportion 122. In additional embodiments, one or more (e.g., each) of thehorizontally extending portions 122 of the doped semiconductive linermaterial 120 exhibits a substantially heterogeneous distribution ofdopant(s) within the semiconductive material thereof, such that thehorizontally extending portion(s) 122 exhibit a substantiallynon-uniform (e.g., non-even, variable) distribution of the dopant(s)within the semiconductive material thereof. For example, amounts (e.g.,atomic concentrations) of the dopant(s) included in each individual ofthe horizontally extending portion 122 of the doped semiconductive linermaterial 120 may vary (e.g., increase, decrease) throughout verticaldimensions (e.g., in the Z-direction) of the horizontally extendingportion 122.

As previously discussed, the vertically extending portions 124 of thedoped semiconductive liner material 120 may individually exhibit aheterogeneous distribution of dopant(s) within the semiconductivematerial thereof, such that each vertically extending portion 124individual exhibits a doped region 126 and a substantially undopedregion 128. In turn, each of the doped regions 126 of the verticallyextending portions 124 of the doped semiconductive liner material 120may individually exhibit a substantially homogeneous distribution ofdopant(s) within the semiconductive material thereof, or mayindividually exhibit a heterogeneous distribution of dopant(s) withinthe semiconductive material thereof. In some embodiments, each of thedoped regions 126 of the vertically extending portions 124 of the dopedsemiconductive liner material 120 exhibits a substantially homogeneousdistribution of dopant(s) within the semiconductive material thereof,such that the doped region 126 of the vertically extending portion 124exhibits a substantially uniform (e.g., even, non-variable) distributionof the dopant(s) within the semiconductive material thereof. Forexample, amounts (e.g., atomic concentrations) of the dopant(s) includedin each individual doped region 126 may not substantially varythroughout the horizontal dimensions (e.g., in the X-direction) of thedoped region 126. In additional embodiments, one or more (e.g., each) ofthe doped regions 126 of the vertically extending portions 124 of thedoped semiconductive liner material 120 exhibits a substantiallyheterogeneous distribution of dopant(s) within the semiconductivematerial thereof, such that the doped region(s) 126 of the verticallyextending portion(s) 124 exhibit a substantially non-uniform (e.g.,non-even, variable) distribution of the dopant(s) within thesemiconductive material thereof. For example, amounts (e.g., atomicconcentrations) of the dopant(s) included in each individual of thedoped region 126 may vary (e.g., increase, decrease) throughouthorizontal dimensions (e.g., in the X-direction) of the doped region126.

The semiconductive liner material 118 (FIG. 1D) may be doped with atleast one dopant to form a doped semiconductive liner material 120 usingconventional processes (e.g., conventional implantation processes,conventional diffusion processes), which are not described in detailherein. As a non-limiting example, one or more phosphorus-containingspecies (e.g., phosphorus atoms, phosphorus-containing molecules,phosphide ions, phosphorus-containing ions) may be implanted into thesemiconductive liner material 118 (FIG. 1D) to form the dopedsemiconductive liner material 120. The phosphorus-containing speciesmay, for example, comprise phosphide ions (P³⁻). As another non-limitingexample, one or more arsenic-containing species (e.g., arsenic atoms,arsenic-containing molecules, arsenic ions, arsenic-containing ions) maybe implanted into the semiconductive liner material 118 (FIG. 1D) toform the doped semiconductive liner material 120. The arsenic-containingspecies may, for example, comprise arsenic ions (As³⁺). In someembodiments, following dopant implantation, an amount of dopant withinat least the horizontally extending portions 122 of the dopedsemiconductive liner material 120 is within a range of from about 0.001atomic percent to about 10 atomic percent.

Referring next to FIG. 1F, portions of the doped semiconductive linermaterial 120 (FIG. 1E) may be converted into a tungsten liner material130 including tungsten and the dopant(s) of the doped semiconductiveliner material 120 (FIG. 1E). The conversion process may convertportions of the semiconductive material (e.g., silicon material, such aspolycrystalline silicon) of the doped semiconductive liner material 120(FIG. 1E) including dopant(s) dispersed therein into tungsten relativelyfaster than semiconductive material of the doped semiconductive linermaterial 120 (FIG. 1E) not including the dopant(s) dispersed therein.Thus, as shown in FIG. 1F, the conversion process may convert thehorizontally extending portions 122 (FIG. 1E) and the doped regions 126(FIG. 1E) of the vertically extending portions 124 (FIG. 1E) of thedoped semiconductive liner material 120 (FIG. 1E) into the tungstenliner material 130, while at least partially (e.g., substantially)maintaining the substantially undoped regions 128 (FIG. 1E) of the dopedsemiconductive liner material 120 (FIG. 1E) to form semiconductivespacer structures 129 (e.g., polysilicon spacer structures). Thetungsten liner material 130 may include horizontally extending portions132 formed from the horizontally extending portions 122 (FIG. 1E) of thedoped semiconductive liner material 120 (FIG. 1E), and verticallyextending portions 134 formed from the doped regions 126 (FIG. 1E) ofthe vertically extending portions 124 (FIG. 1E) of the dopedsemiconductive liner material 120 (FIG. 1E). The semiconductive spacerstructures 129 may be positioned horizontally adjacent to (e.g.,horizontally under in the X-direction) the vertically extending portions134 of the tungsten liner material 130.

At least some of the tungsten of the tungsten liner material 130 maycomprise β-phase tungsten. β-phase tungsten has a metastable, A15 cubicstructure. Grains of the β-phase tungsten may exhibit generally columnarshapes. Tungsten included within the tungsten liner material 130 mayonly be present in the β-phase, or may be present in the β-phase and inthe alpha (α) phase. If present, the α-phase tungsten has a metastable,body-centered cubic structure. Grains of the α-phase tungsten mayexhibit generally isometric shapes. If the tungsten liner material 130includes β-phase tungsten and α-phase tungsten, an amount of β-phasetungsten included in the tungsten liner material 130 may be differentthan an amount of α-phase tungsten included in the tungsten linermaterial 130, or may be substantially the same as amount of α-phasetungsten included in the tungsten liner material 130. In someembodiments, an amount of β-phase tungsten included in the tungstenliner material 130 is greater than an amount of α-phase tungstenincluded in the tungsten liner material 130. For example, at least amajority (e.g., greater than 50 percent, such as greater than or equalto about 60 percent, greater than or equal to about 70 percent, greaterthan or equal to about 80 percent, greater than or equal to about 90percent, greater than or equal to about 95 percent, or greater than orequal to about 99 percent) of the tungsten included in the tungstenliner material 130 may be present in the β-phase.

The dopant(s) included in the tungsten liner material 130 may besubstantially the same as the dopant(s) included in the dopedsemiconductive liner material 120 (FIG. 1E) employed to form thetungsten liner material 130. For example, dopant(s) (e.g., N-typedopants, P-type dopants, other dopants) included in the horizontallyextending portions 122 (FIG. 1E) and the doped regions 126 (FIG. 1E) ofthe vertically extending portions 124 (FIG. 1E) of the dopedsemiconductive liner material 120 (FIG. 1E) may also be present in thehorizontally extending portions 132 and the vertically extendingportions 134 of the tungsten liner material 130. In some embodiments,the tungsten liner material 130 includes β-phase tungsten doped with oneor more of As and P. The dopant(s) of the tungsten liner material 130may support (e.g., facilitate, promote) the stability of the β-phasetungsten of the tungsten liner material 130.

The tungsten liner material 130 may exhibit a substantially homogeneousdistribution of the dopant(s) thereof, or may exhibit a heterogeneousdistribution of the dopant(s) thereof. The distribution of the dopant(s)within the tungsten liner material 130 may be substantially the same asor may be different than a distribution of the dopant(s) withindopant-containing portions (e.g., the horizontally extending portions122 and the doped regions 126 of the vertically extending portions 124)of the doped semiconductive liner material 120 (FIG. 1E). In someembodiments, a distribution of the dopant(s) within the tungsten linermaterial 130 is substantially the same as a distribution of thedopant(s) within the horizontally extending portions 122 (FIG. 1E) andthe doped regions 126 (FIG. 1E) of the vertically extending portions 124(FIG. 1E) of the doped semiconductive liner material 120 (FIG. 1E).

The tungsten liner material 130 may be formed by treating the dopedsemiconductive liner material 120 (FIG. 1E) with one or more chemicalspecies facilitating the conversion of the semiconductive material(e.g., silicon material) thereof into tungsten (e.g., β-phase tungsten,α-phase tungsten). By way of non-limiting example, if the dopedsemiconductive liner material 120 (FIG. 1E) comprises a doped siliconmaterial, such as doped polycrystalline silicon, the dopedsemiconductive liner material 120 (FIG. 1E) may be treated with tungstenhexafluoride (WF₆) to form the tungsten liner material 130. Silicon (Si)of the doped semiconductive liner material 120 (FIG. 1E) may react withthe WF₆ to produce tungsten (W) and silicon tetrafluoride (SiF₄). Theproduced SiF₄ is removed as a gas. The produced W remains with thedopant(s) of the doped semiconductive liner material 120 (FIG. 1E) toform the tungsten liner material 130. The doped semiconductive linermaterial 120 (FIG. 1E) may, for example, be treated with WF₆ using aconventional CVD apparatus at a temperature within a range of from about200° C. to about 500° C.

Referring next to FIG. 1G, the vertically extending portions 134 (FIG.1F) of the tungsten liner material 130 (FIG. 1F) may be substantiallyremoved to expose vertically extending surfaces of the semiconductivespacer structures 129. Portions of the horizontally extending portions132 (FIG. 1F) of the tungsten liner material 130 (FIG. 1F) remainfollowing the removal of the vertically extending portions 134 (FIG. 1F)of the tungsten liner material 130 (FIG. 1F) to form tungsten padstructures 136. The tungsten pad structures 136 may be separate anddiscrete from one another. As shown in FIG. 1G, at least some of thetungsten pad structures 136 may be positioned vertically on portions ofthe additional insulative structures 106 of the preliminary stackstructure 102 at the steps 112 of the staircase structure 110. The atleast some of the tungsten pad structures 136 may also be positionedvertically on portions of the dielectric spacer structures 116 and thesemiconductive spacer structures 129 at the steps 112 of the staircasestructure 110. As shown in FIG. 1G, one or more additional tungsten padstructures 136 may be positioned on or over surfaces of the preliminarystack structure 102 outside of the boundaries (e.g., horizontalboundaries, vertical boundaries) of the staircase structure 110.

Thicknesses (e.g., in the Z-direction) of the tungsten pad structures136 may be less than or equal to thicknesses of the horizontallyextending portions 132 (FIG. 1F) of the tungsten liner material 130(FIG. 1F). In some embodiments, the material removal process employed tosubstantially remove the vertically extending portions 134 (FIG. 1F) ofthe tungsten liner material 130 (FIG. 1F) also partially removes thehorizontally extending portions 132 (FIG. 1F) of the tungsten linermaterial 130 (FIG. 1F), such that a thickness of each of the tungstenpad structures 136 is less than (e.g., thinner than) a thickness of thehorizontally extending portion 132 (FIG. 1F) of the tungsten linermaterial 130 (FIG. 1F) from which the tungsten pad structure 136 wasformed. In some embodiments, each of the tungsten pad structures 136individually has a thickness within a range of from about 10 percent toabout 70 percent (e.g., from about 30 percent to about 70 percent, fromabout 40 percent to about 60 percent) of a thickness of the horizontallyextending portion 132 (FIG. 1F) of the tungsten liner material 130 (FIG.1F) from which the tungsten pad structure 136 was formed.

The vertically extending portions 134 (FIG. 1F) of the tungsten linermaterial 130 (FIG. 1F) may be removed (and the tungsten pad structures136 may be formed) by treating the tungsten liner material 130 (FIG. 1F)with at least one etchant (e.g., wet etchant). By way of non-limitingexample, the etchant may comprise a phosphoric-acetic-nitric acid (PAN)etchant. The tungsten liner material 130 (FIG. 1F) may be exposed to theetchant using conventional processes (e.g., a spin-coating process, aspray-coating process, an immersion-coating process, a vapor-coatingprocess, a soaking process, combinations thereof) and conventionalprocessing equipment, which are not described in detail herein.

Referring next to FIG. 1H, the semiconductive spacer structures 129(FIG. 1G) may be selectively removed. The selective removal of thesemiconductive spacer structures 129 (FIG. 1G) may expose portions ofthe additional insulative structures 106 of the preliminary stackstructure 102 at the steps 112 of the staircase structure 110. Forexample, the selective removal of the semiconductive spacer structures129 (FIG. 1G) may expose portions of horizontal surfaces (e.g., uppersurfaces) of the additional insulative structures 106 previously coveredby (e.g., directly adjacent to) the semiconductive spacer structures 129(FIG. 1G). The selective removal of the semiconductive spacer structures129 (FIG. 1G) may also expose vertical surfaces (e.g., side surfaces) ofthe insulative structures 104 at the steps 112 of the staircasestructure 110, and vertical surfaces (e.g., side surfaces) of thedielectric spacer structures 116 (if any) at the steps 112 of thestaircase structure 110. In addition, if one or more of thesemiconductive spacer structures 129 (FIG. 1G) are located outside ofthe boundaries (e.g., vertical boundaries, horizontal boundaries) of thestaircase structure 110, the selective removal of the one or more of thesemiconductive spacer structures 129 (FIG. 1G) may also uncover (e.g.,expose) surfaces of the microelectronic device structure 100 (e.g.,surfaces of one or more of the insulative structures 104, the additionalinsulative structures 106, and the dielectric spacer structures 116 (ifany)) directly adjacent (e.g., directly horizontally adjacent, directlyvertically adjacent) to the one or more of the semiconductive spacerstructures 129 (FIG. 1G).

As shown in FIG. 1H, the selective removal of the semiconductive spacerstructures 129 (FIG. 1G) may form air gaps 138 intervening betweenneighboring tungsten pad structures 136. The air gaps 138 may eachindividually vertically extend (e.g., in the Z-direction) from a lowervertical boundary (e.g., a lower surface) of a relatively verticallyhigher tungsten pad structure 136 to a lower vertical boundary (e.g., alower surface) of a relatively vertically lower tungsten pad structure136 horizontally neighboring the relatively vertically higher tungstenpad structure 136. In addition, the air gaps 138 may each individuallyhorizontally extend (e.g., in the X-direction) from a horizontalboundary (e.g., a side surface) of one of the tungsten pad structures136 to a horizontal boundary of at least one other structure (e.g.,dielectric spacer structure 116 (if any), insulative structure 104,additional insulative structure 106) of the microelectronic devicestructure 100 horizontally neighboring the tungsten pad structure 136.

The semiconductive spacer structures 129 (FIG. 1G) may be selectivelyremoved by treating the microelectronic device structure 100 with atleast one etchant (e.g., wet etchant) formulated to remove thesemiconductive spacer structures 129 (FIG. 1G) without substantiallyremoving exposed portions of the tungsten pad structures 136, thedielectric spacer structures 116 (if any), the insulative structures104, and additional insulative structures 106. By way of non-limitingexample, the etchant may comprise one or more of hydrofluoric acid (HF),a buffered oxide etchant (BOE), and nitric acid (HNO₃). In someembodiments, the etchant comprises a solution including water and HF ata ratio within a range of from about 500:1 to about 100:1. The materialremoval process may selectively remove the semiconductive spacerstructures 129 (FIG. 1G), and may also clean and rinse exposed surfacesof the preliminary stack structure 102, the dielectric spacer structure116 (if any), and the tungsten pad structures 136. In some embodiments,the material removal process includes treating the microelectronicdevice structure 100 with an aqueous HF solution, followed by treatmentwith tetramethylammonium hydroxide (TMAH).

Referring to FIG. 1I, in additional embodiments, rather than removingthe semiconductive spacer structures 129 (FIG. 1G) to form the air gaps138 (FIG. 1H), the semiconductive spacer structures 129 (FIG. 1G) may beconverted to insulative spacer structures 140. The insulative spacerstructures 140 may, for example, be formed of and include a dielectricoxide material (e.g., SiO_(x)) formed by oxidizing the semiconductivematerial (e.g., silicon material) of the semiconductive spacerstructures 129 (FIG. 1G). In some embodiments, the insulative spacerstructures 140 are formed of and include SiO_(x) (e.g., SiO₂). Inadditional embodiments, the insulative spacer structures 140 are formedof and include a different dielectric material, such as a dielectricoxynitride material (e.g., SiO_(x)N_(y)).

As shown in FIG. 1I, the insulative spacer structures 140 may intervenebetween neighboring tungsten pad structures 136. The insulative spacerstructures 140 may each individually vertically extend (e.g., in theZ-direction) from a lower vertical boundary (e.g., a lower surface) of arelatively vertically higher tungsten pad structure 136 to a lowervertical boundary (e.g., a lower surface) of a relatively verticallylower tungsten pad structure 136 horizontally neighboring the relativelyvertically higher tungsten pad structure 136. In addition, theinsulative spacer structures 140 may each individually horizontallyextend (e.g., in the X-direction) from a horizontal boundary (e.g., aside surface) of one of the tungsten pad structures 136 to a horizontalboundary of at least one other structure (e.g., dielectric spacerstructure 116 (if any), insulative structure 104, additional insulativestructure 106) of the microelectronic device structure 100 horizontallyneighboring the tungsten pad structure 136.

The insulative spacer structures 140 (if formed) may be formed using oneor more conventional processes (e.g., a conventional oxidation process),which are not described in detail herein. As a non-limiting example, thesemiconductive spacer structures 129 (FIG. 1G) may be exposed to anoxygen-containing atmosphere (e.g., an atmosphere containing O₂ gasand/or another oxidizing agent) to form the insulative spacer structures140. In some embodiments, the semiconductive spacer structures 129 (FIG.1G) are exposed to air for a sufficient period of time to form theinsulative spacer structures 140.

With returned reference to FIG. 1H, following the formation of the airgaps 138 (or the insulative spacer structures 140 (FIG. 1I)), themicroelectronic device structure 100 is subjected to additionalprocessing to at least partially replace the additional insulativestructures 106 of the preliminary stack structure 102 with conductivestructures. For example, referring to FIG. 1J, the microelectronicdevice structure 100 at the processing stage depicted in FIG. 1H (orFIG. 1I) may be subjected to so called “replacement gate” or “gate last”processing acts to at least partially replace the additional insulativestructures 106 (FIG. 1H) of the tiers 108 (FIG. 1H) of the preliminarystack structure 102 (FIG. 1H) with conductive structures 144 and form astack structure 142. The stack structure 142 includes verticallyalternating (e.g., in the Z-direction) sequence of the insulativestructures 104 and the conductive structures 144 arranged in tiers 146.Each of the tiers 146 of the stack structure 142 includes at least oneof the insulative structures 104 vertically neighboring at least one ofthe conductive structures 144. The conductive structures 144 may contact(e.g., physically contact, electrically contact) the tungsten padstructures 136 at the steps 112 of the staircase structure 110.

The conductive structures 144 may be formed of and include at least oneelectrically conductive material, such as one or more of a metal, analloy, a conductive metal oxide, a conductive metal nitride, aconductive metal silicide, and a conductively doped semiconductormaterial. By way of non-limiting example, the conductive structures 144may be formed of and include one or more of tungsten (W), tungstennitride (WN_(y)), nickel (Ni), tantalum (Ta), tantalum nitride(TaN_(y)), tantalum silicide (TaSi_(x)), platinum (Pt), copper (Cu),silver (Ag), gold (Au), aluminum (Al), molybdenum (Mo), titanium (Ti),titanium nitride (TiN_(y)), titanium silicide (TiSi_(x)), titaniumsilicon nitride (TiSi_(x)N_(y)), titanium aluminum nitride(TiAl_(x)N_(y)), molybdenum nitride (MoN_(x)), iridium (Ir), iridiumoxide (IrO_(z)), ruthenium (Ru), ruthenium oxide (RuO_(z)), andconductively doped silicon. In some embodiments, the conductivestructures 144 are formed of and include tungsten (W).

At least some of the electrically conductive material (e.g., tungsten)of the conductive structures 144 may have a different crystalline phasestructure than that of the tungsten of the tungsten pad structures 136.By way of non-limiting example, the conductive structures 144 may beformed to comprise α-phase tungsten. Tungsten included within theconductive structures 144 may only be present in the α-phase, or may bepresent in the α-phase and in the β-phase. If the conductive structures144 include α-phase tungsten and β-phase tungsten, amounts of α-phasetungsten included in the conductive structures 144 may be greater thanamounts of β-phase tungsten included in the conductive structures 144.For example, at least a majority (e.g., greater than 50 percent, such asgreater than or equal to about 60 percent, greater than or equal toabout 70 percent, greater than or equal to about 80 percent, greaterthan or equal to about 90 percent, greater than or equal to about 95percent, or greater than or equal to about 99 percent) of the tungstenincluded in the conductive structures 144 may be present in the α-phase.In some embodiments, the conductive structures 144 are formed of andinclude α-phase tungsten, and the tungsten pad structures 136 are formedof and include β-phase tungsten.

During replace gate processing, the preliminary stack structure 102(FIG. 1H) may be subjected to a material removal process to selectivelyremove (e.g., selectively exhume) at least a portion (e.g., all, lessthan all) of each the additional insulative structures 106 (FIG. 1H)relative to the insulative structures 104. For example, slots (e.g.,slits, openings, trenches) may be formed to vertically extend (e.g., inthe Z-direction) through the preliminary stack structure 102 (FIG. 1H),and then portions of the additional insulative structures 106 may beselectively removed through the slots using one or more etchants.Thereafter, open volumes (e.g., void spaces) formed by the removedportions of the additional insulative structures 106 (FIG. 1H) may befilled with electrically conductive material (e.g., tungsten) to formthe conductive structures 144.

Referring next to FIG. 1K, an isolation material 147 may be formed on orover the stack structure 142, the staircase structure 110, and thetungsten pad structures 136; and conductive contact structures 148 maybe formed to vertically extend through the isolation material 147 andcontact (e.g., physically contact, electrically contact) the tungstenpad structures 136. In some embodiments, the conductive contactstructures 148 are formed to land on the tungsten pad structures 136. Asshown in FIG. 1K, the isolation material 147 may substantially cover thestaircase structure 110 and the tungsten pad structures 136, and maysubstantially surround side surfaces (e.g., sidewalls) of the conductivecontact structures 148. The isolation material 147 may exhibit asubstantially planer upper vertical boundary, and a substantiallynon-planar lower vertical boundary complementary (e.g., substantiallymirroring) to the topography thereunder.

The isolation material 147 may be formed of and include at least onedielectric material, such as one or more of at least one dielectricoxide material (e.g., one or more of SiO_(x), phosphosilicate glass,borosilicate glass, borophosphosilicate glass, fluorosilicate glass,AlO_(x), HfO_(x), NbO_(x), TiO_(x), ZrO_(x), TaO_(x), and MgO_(x)), atleast one dielectric nitride material (e.g., SiN_(y)), at least onedielectric oxynitride material (e.g., SiO_(x)N_(y)), and at least onedielectric carboxynitride material (e.g., SiO_(x)C_(z)N_(y)). Theisolation material 147 may include a substantially homogeneousdistribution or a substantially heterogeneous distribution of the atleast one dielectric material. In some embodiments, the isolationmaterial 147 exhibits a substantially homogeneous distribution ofdielectric material. In further embodiments, the isolation material 147exhibits a substantially heterogeneous distribution of at least onedielectric material. The isolation material 147 may, for example, beformed of and include a stack (e.g., laminate) of at least two differentdielectric materials. In some embodiments, the isolation material 147 isformed of and includes SiO₂. Optionally, at least one non-oxidedielectric liner material (e.g., a dielectric nitride liner material,such as SiN_(y)) may be formed to intervene between the isolationmaterial 147 and tungsten pad structures 136 and the conductivestructures 144 of the stack structure 142. The non-oxide dielectricliner material may, for example, be employed to impede or preventoxidation of the tungsten pad structures 136 and the conductivestructures 144 during the formation of the isolation material 147 (e.g.,if the isolation material 147 is formed to comprise a dielectric oxidematerial, such as SiO₂).

The conductive contact structures 148 may be formed of and include atleast one electrically conductive material, such as one or more of ametal (e.g., W, Ti, Mo, Nb, V, Hf, Ta, Cr, Zr, Fe, Ru, Os, Co, Rh, Ir,Ni, Pa, Pt, Cu, Ag, Au, Al), an alloy (e.g., a Co-based alloy, anFe-based alloy, an Ni-based alloy, an Fe- and Ni-based alloy, a Co- andNi-based alloy, an Fe- and Co-based alloy, a Co- and Ni- and Fe-basedalloy, an Al-based alloy, a Cu-based alloy, a Mg-based alloy, a Ti-basedalloy, a steel, a low-carbon steel, a stainless steel), a conductivemetal-containing material (e.g., a conductive metal nitride, aconductive metal silicide, a conductive metal carbide, a conductivemetal oxide), a conductively-doped semiconductor material (e.g.,conductively-doped Si, conductively-doped Ge, conductively-doped SiGe).Each of the conductive contact structures 148 may have substantially thesame material composition, or at least one of the conductive contactstructures 148 may have a different material composition than at leastone other of the conductive contact structures 148.

The conductive contact structures 148 may each individually be providedat a desired horizontal location (e.g., in the X-direction and inanother horizontal direction perpendicular to the X-direction) on orover one of the tungsten pad structures 136. As shown in FIG. 1K, insome embodiments, each of the conductive contact structures 148 isindividually substantially horizontally centered on one of the tungstenpad structures 136. For example, the conductive contact structures 148may be substantially horizontally centered in the X-direction and inanother horizontal direction perpendicular to the X-direction (e.g., aY-direction) on the tungsten pad structures 136. Accordingly, theconductive contact structures 148 may be offset (e.g., in theX-direction) from horizontal centers of portions (e.g., horizontal endportions) of the conductive structure 144 directly vertically underlying(e.g., in the Z-direction) the tungsten pad structures 136 and partiallydefining the steps 112 of the staircase structure 110. In additionalembodiments, one or more of the conductive contact structures 148 areindividually horizontally offset (e.g., in the X-direction and/or inanother horizontal direction perpendicular to the X-direction) from thehorizontal center of the tungsten pad structures 136 associatedtherewith (e.g., directly vertically thereunder). For example, at leastone (e.g., all, less than all) of the conductive contact structures 148may be horizontally offset in the X-direction from a horizontal centerof the tungsten pad structure(s) 136 on which the conductive contactstructure(s) 148 is located. As another example, at least one (e.g.,all, less than all) of the conductive contact structures 148 may behorizontally offset in another horizontal direction perpendicular to theX-direction from a horizontal center of the tungsten pad structure(s)136 on which the conductive contact structure(s) 148 is located.

The isolation material 147 and the conductive contact structures 148 maybe formed through conventional processes (e.g., conventional materialdeposition processes; conventional material removal processes, such asconventional etching processes) and conventional processing equipment,which are not described in detail herein. The tungsten pad structures136 may impede or prevent undesirable damage to the tiers 146 of thestack structure 142 during the formation of the conductive contactstructures 148. For example, the tungsten pad structures 136 may preventportions of the conductive structures 144 of the stack structure 142 atthe steps 112 of the staircase structure 110 from being undesirablydamaged (e.g., punched through) during one or more etching processesemployed to form openings in the isolation material 147 that aresubsequently filled with electrically conductive material to form theconductive contact structures 148.

Thus, in accordance with embodiments of the disclosure, amicroelectronic device comprises a stack structure, a staircasestructure, conductive pad structures, and conductive contact structures.The stack structure comprises vertically alternating conductivestructures and insulating structures arranged in tiers. Each of thetiers individually comprises one of the conductive structures and one ofthe insulating structures. The staircase structure has steps comprisingedges of at least some of the tiers of the stack structure. Theconductive pad structures are on the steps of the staircase structureand comprise beta phase tungsten. The conductive contact structures areon the conductive pad structures.

Furthermore, in accordance with embodiments of the disclosure, a methodof forming a microelectronic device comprises forming a microelectronicdevice structure. The microelectronic device structure comprises a stackstructure comprising a vertically alternating sequence of insulativestructures and additional insulative structures arranged in tiers, and astaircase structure having steps comprising edges of at least some ofthe tiers of the stack structure. A doped semiconductive liner materialis formed on the steps of the staircase structure. Portions of the dopedsemiconductive liner material are converted into a tungsten linermaterial. Vertically extending portions of the tungsten liner materialare removed to form discrete tungsten pad structures on the steps of thestaircase structure. The additional insulative structures of the stackstructure are at least partially replaced with conductive structures.Conductive contact structures are formed on the discrete tungsten padstructures.

In additional embodiments, different processing acts are employed toform the microelectronic device structure 100 at the processing stagedepicted in FIG. 1K. By way of non-limiting example, FIGS. 2A through 2Care simplified partial cross-sectional views illustrating a method offorming a microelectronic device structure 200, in accordance withadditional embodiments of the disclosure. The processing acts depictedin FIGS. 2A through 2C and described in further detail below may, forexample, be performed in place of the processing acts previouslydescribed with reference to FIGS. 1F through 1H (or 1I) to form themicroelectronic device structure 100 previously described with referenceto FIG. 1K. Throughout FIGS. 2A through 2C and the associateddescription below, features (e.g., structures, materials, regions)functionally similar to features of the microelectronic device structure100 previously described with reference to FIGS. 1A through 1K arereferred to with similar reference numerals incremented by 100. To avoidrepetition, not all features shown in FIGS. 2A through 2C are describedin detail herein. Rather, unless described otherwise below, in FIGS. 2Athrough 2C, a feature designated by a reference numeral that is a 100increment of the reference numeral of a previously described featurewill be understood to be substantially similar to thepreviously-described feature.

Referring to FIG. 2A, the microelectronic device structure 200 may beformed to include features (e.g., structures, materials) substantiallysimilar to the features (e.g., structures, materials) of themicroelectronic device structure 100 up to and including the processingstage previously described with reference to FIG. 1E. For example, themicroelectronic device structure 200 may be formed to include apreliminary stack structure 202 including a vertically alternating(e.g., in the Z-direction) sequence of insulative structures 204 andadditional insulative structures 206 arranged in tiers 208; a staircasestructure 210 having steps 212 defined by edges (e.g., horizontal endsin the X-direction) of the tiers 208; optional dielectric spacerstructures 216 at horizontal ends (e.g., in the X-direction) of thesteps 212 of the staircase structure 210; and a doped semiconductiveliner material 220 on or over surfaces of the insulative structures 204,the additional insulative structures 206, and the dielectric spacerstructures 216 (if any) inside of and outside of the boundaries (e.g.,vertical boundaries, horizontal boundaries) of the staircase structure210. The doped semiconductive liner material 220 may includehorizontally extending portions 222 and vertically extending portions224, and the vertically extending portions 224 may include doped regions226, and substantially undoped regions 228 horizontally adjacent to(e.g., horizontally underlying in the X-direction) the doped regions226. The preliminary stack structure 202, the insulative structures 204,the additional insulative structures 206, the tiers 208, the staircasestructure 210, the steps 212, the dielectric spacer structures 216 (ifany), and the doped semiconductive liner material 220 may respectivelybe substantially similar to and may be formed in substantially the samemanner as the preliminary stack structure 102, the insulative structures104, the additional insulative structures 106, the tiers 108, thestaircase structure 110, the steps 112, the dielectric spacer structures116 (if any), and the doped semiconductive liner material 120 of themicroelectronic device structure 100 up to and including the processingstage previously described with reference to FIG. 1E. Accordingly, themethod of forming the microelectronic device structure 200 up to andincluding the processing stage depicted in FIG. 2A incorporates theprocessing stages and features previously described in relation to theformation of the microelectronic device structure 100 up to andincluding the processing stage previously described with reference toFIG. 1E.

In addition to being selected to promote subsequent formation oftungsten (e.g., β-phase tungsten) from the semiconductive material(e.g., silicon material) of the doped semiconductive liner material 220,the dopant(s) of the doped semiconductive liner material 220 may beselected to arrest (e.g., impede, slow) removal (e.g., etching) ofregions (e.g., the horizontally extending portions 222) of the dopedsemiconductive liner material 220 having relatively greater amounts ofthe dopant(s) therein relative to other regions (e.g., the verticallyextending portions 224) having relatively smaller amounts of thedopant(s) therein. For example, the dopant(s) may be selected to deceasean etch rate of the horizontally extending portions 222 of the dopedsemiconductive liner material 220 relative to the substantially undopedregions 228 of the vertically extending portions 224 of the dopedsemiconductive liner material 220. In some embodiments, the dopant(s) ofthe doped semiconductive liner material 220 comprise B. In additionalembodiments, the dopant(s) of the doped semiconductive liner material220 comprise one or more of P, Ar, Sb, Bi, Al, Ga, C, F, Cl, Br, H, ²H,He, Ne, and Ar.

Referring next to FIG. 2B, the vertically extending portions 224 (FIG.2A) of the doped semiconductive liner material 220 (FIG. 2A) may besubstantially removed while maintaining portions of the horizontallyextending portions 222 (FIG. 2A) of the doped semiconductive linermaterial 220 (FIG. 2A) to form semiconductive pad structures 223. Thesemiconductive pad structures 223 may be separate and discrete from oneanother. As shown in FIG. 2B, at least some of the semiconductive padstructures 223 may be positioned vertically on portions of theadditional insulative structures 206 of the preliminary stack structure202 at the steps 212 of the staircase structure 210. The at least someof the semiconductive pad structures 223 may also be positionedvertically on portions of the dielectric spacer structures 216 (if any)at the steps 212 of the staircase structure 210. As shown in FIG. 2B,one or more additional semiconductive pad structures 223 may bepositioned on or over surfaces of the preliminary stack structure 202outside of the boundaries (e.g., horizontal boundaries, verticalboundaries) of the staircase structure 210.

Thicknesses (e.g., in the Z-direction) of the semiconductive padstructures 223 may be less than or equal to thicknesses of thehorizontally extending portions 222 (FIG. 2A) of the dopedsemiconductive liner material 220 (FIG. 2A). In some embodiments, thematerial removal process employed to substantially remove the verticallyextending portions 224 (FIG. 2A) of the doped semiconductive linermaterial 220 (FIG. 2A) also partially removes the horizontally extendingportions 222 (FIG. 2A) of the doped semiconductive liner material 220(FIG. 2A), such that a thickness of each of the semiconductive padstructures 223 is less than (e.g., thinner than) a thickness of thehorizontally extending portion 222 (FIG. 2A) of the doped semiconductiveliner material 220 (FIG. 2A) from which the semiconductive pad structure223 was formed. In some embodiments, each of the semiconductive padstructures 223 individually has a thickness within a range of from about10 percent to about 70 percent (e.g., from about 30 percent to about 70percent, from about 40 percent to about 60 percent) of a thickness ofthe horizontally extending portion 222 (FIG. 2A) of the dopedsemiconductive liner material 220 (FIG. 2A) from which thesemiconductive pad structure 223 was formed.

As shown in FIG. 1H, the removal of the vertically extending portions224 (FIG. 2A) of the doped semiconductive liner material 220 (FIG. 2A)forms air gaps 238 intervening between neighboring semiconductive padstructures 223. The air gaps 238 may each individually vertically extend(e.g., in the Z-direction) from a lower vertical boundary (e.g., a lowersurface) of a relatively vertically higher semiconductive pad structure223 to a lower vertical boundary (e.g., a lower surface) of a relativelyvertically lower semiconductive pad structure 223 horizontallyneighboring the relatively vertically higher semiconductive padstructure 223. In addition, the air gaps 238 may each individuallyhorizontally extend (e.g., in the X-direction) from a horizontalboundary (e.g., a side surface) of one of the semiconductive padstructures 223 to a horizontal boundary of at least one other structure(e.g., dielectric spacer structure 216 (if any), insulative structure204, additional insulative structure 206) of the microelectronic devicestructure 200 horizontally neighboring the semiconductive pad structure223.

The vertically extending portions 224 (FIG. 2A) of the dopedsemiconductive liner material 220 (FIG. 2A) may be removed by treatingthe microelectronic device structure 200 with at least one etchant(e.g., wet etchant) formulated to remove the doped semiconductive linermaterial 220 (FIG. 2A) without substantially removing exposed portionsof the dielectric spacer structures 216 (if any), the insulativestructures 204, and additional insulative structures 206. The at leastone etchant may remove the substantially undoped regions 228 (FIG. 2A)of the vertically extending portions 224 (FIG. 2A) of the dopedsemiconductive liner material 220 (FIG. 2A) faster than the horizontallyextending portions 222 (FIG. 2A) of the doped semiconductive linermaterial 220 (FIG. 2A). By way of non-limiting example, the etchant maycomprise one or more of HF, a BOE, and HNO₃. In some embodiments, theetchant comprises a solution including water and HF at a ratio within arange of from about 500:1 to about 100:1. The material removal processmay selectively remove the vertically extending portions 224 (FIG. 2A)of the doped semiconductive liner material 220 (FIG. 2A), and may alsoclean and rinse exposed surfaces of the preliminary stack structure 202,the dielectric spacer structure 216 (if any), and the semiconductive padstructures 223. In some embodiments, the material removal processincludes treating the microelectronic device structure 200 with anaqueous HF solution, followed by treatment with TMAH.

Referring next to FIG. 2C, the semiconductive pad structures 223 (FIG.2B) may be converted into tungsten pad structures 236. The conversionprocess may convert portions of the semiconductive material (e.g.,silicon material, such as polycrystalline silicon) of the semiconductivepad structures 223 (FIG. 2B) into tungsten. The tungsten pad structures236 may be substantially similar to the tungsten pad structures 136previously described with reference to FIG. 1H. For example, at leastsome of the tungsten of tungsten pad structures 236 may comprise β-phasetungsten. Tungsten included within the tungsten pad structures 236 mayonly be present in the β-phase, or may be present in the β-phase and inthe α-phase. If the tungsten pad structures 236 include β-phase tungstenand α-phase tungsten, an amount of β-phase tungsten included in thetungsten pad structures 236 may be different than an amount of α-phasetungsten included in the tungsten pad structures 236, or may besubstantially the same as amount of α-phase tungsten included in thetungsten pad structures 236. In some embodiments, an amount of β-phasetungsten included in the tungsten pad structures 236 is greater than anamount of α-phase tungsten included in the tungsten pad structures 236.For example, at least a majority (e.g., greater than 50 percent, such asgreater than or equal to about 60 percent, greater than or equal toabout 70 percent, greater than or equal to about 80 percent, greaterthan or equal to about 90 percent, greater than or equal to about 95percent, or greater than or equal to about 99 percent) of the tungstenincluded in the tungsten pad structures 236 may be present in theβ-phase.

The tungsten pad structures 236 may be formed by treating thesemiconductive pad structures 223 (FIG. 2B) with one or more chemicalspecies facilitating the conversion of the semiconductive material(e.g., silicon material) thereof into tungsten (e.g., β-phase tungsten,α-phase tungsten). By way of non-limiting example, if the semiconductivepad structures 223 (FIG. 2B) comprise a doped silicon material, such asdoped polycrystalline silicon, the semiconductive pad structures 223(FIG. 2B) may be treated with WF₆ to form the tungsten pad structures236. Silicon (Si) of the semiconductive pad structures 223 (FIG. 2B) mayreact with the WF₆ to produce tungsten and SiF₄. The produced SiF₄ isremoved as a gas. The produced tungsten remains with the dopant(s) ofthe semiconductive pad structures 223 (FIG. 2B) to form the tungsten padstructures 236. The semiconductive pad structures 223 (FIG. 2B) may, forexample, be treated with WF₆ using a conventional CVD apparatus at atemperature within a range of from about 200° C. to about 500° C.

Following the formation of the tungsten pad structures 236, themicroelectronic device structure 200 may be subjected to additionalprocessing. For example, the microelectronic device structure 200 may besubjected to the additional processing acts previously described withreference to FIGS. 1J and 1K to form a configuration of themicroelectronic device structure 200 substantially the same as theconfiguration of the microelectronic device structure 100 previouslydescribed with reference to FIG. 1K. Accordingly, the method of formingthe microelectronic device structure 200 following the processing stagedepicted in FIG. 2C incorporates the processing stages and featurespreviously described in relation to the formation of the microelectronicdevice structure 100 up to and including the processing stage previouslydescribed with reference to FIG. 1K.

Thus, in accordance with embodiments of the disclosure, a method offorming a microelectronic device comprises forming a microelectronicdevice structure. The microelectronic device structure comprises a stackstructure comprising a vertically alternating sequence of insulativestructures and additional insulative structures arranged in tiers, and astaircase structure having steps comprising edges of at least some ofthe tiers of the stack structure. A doped semiconductive liner materialis formed over and in contact with at least some of the additionalinsulative structures of the stack structure at the steps of thestaircase structure. Vertically extending portions of the dopedsemiconductive liner material are removed to form discretesemiconductive pad structures over the steps of the staircase structure.The discrete semiconductive pad structures are converted into discreteconductive pad structures. At least some portions of the additionalinsulative structures of the stack structure are replaced withconductive structures. Conductive contact structures are formed on thediscrete conductive pad structures.

FIG. 3 illustrates a partial cutaway perspective view of a portion of amicroelectronic device 300 (e.g., a memory device, such as a 3D NANDFlash memory device) including a microelectronic device structure 302.The microelectronic device structure 302 may be substantially similar tothe microelectronic device structure 100 at the processing stagepreviously described with reference to FIG. 1K. In some embodiments, themicroelectronic device structure 302 is formed through the processespreviously described with reference to FIGS. 1A through 1K. Inadditional embodiments, the microelectronic device structure 302 isformed through the processes previously described with reference FIGS.2A through 2C. As shown in FIG. 3, the microelectronic device structure302 may include a stack structure 304 including a vertically alternating(e.g., in the Z-direction) sequence of conductive structures 306 andinsulative structures 308 arranged in tiers 310; a staircase structure312 having steps 314 defined by edges (e.g., horizontal ends in theX-direction) of the tiers 310; tungsten pad structures 316 on portionsof the conductive structures 306 at the steps 314 of the staircasestructure 312; and conductive contact structures 318 connected (e.g.,physically connected, electrically connected) to the tungsten padstructures 316. The stack structure 304, the conductive structures 306,the insulative structures 308, the tiers 310, the staircase structure312, the steps 314, the tungsten pad structures 316, and the conductivecontact structures 318 may respectively be substantially similar to thestack structure 142, the conductive structures 144, the insulativestructures 104, the tiers 146, the staircase structure 110, the steps112, the tungsten pad structures 136, and the conductive contactstructures 148 previously described with reference to FIG. 1K. Themicroelectronic device 300 also includes additional features (e.g.,structures, devices) operatively associated with the microelectronicdevice structure 302, as described in further detail below.

The microelectronic device 300 may further include vertical strings 319of memory cells 320 coupled to each other in series, data lines 322(e.g., bit lines), a source structure 324, access lines 326, firstselect gates 328 (e.g., upper select gates, drain select gates (SGDs)),select lines 330, second select gates 332 (e.g., lower select gates,source select gate (SGSs)), and additional contact structures 334. Thevertical strings 319 of memory cells 320 extend vertically andorthogonal to conductive lines and tiers (e.g., the data lines 322, thesource structure 324, the tiers 310 of the stack structure 304, theaccess lines 326, the first select gates 328, the select lines 330, thesecond select gates 332). The conductive contact structures 318 and theadditional contact structures 334 may electrically couple components toeach other as shown (e.g., the select lines 330 to the first selectgates 328, the access lines 326 to the tiers 310 of the stack structure304 of the microelectronic device structure 302).

With continued reference to FIG. 3, the microelectronic device 300 mayalso include a control unit 336 (e.g., a control device) positionedvertically below the vertical strings 319 of memory cells 320, which mayinclude one or more of string driver circuitry, pass gates, circuitryfor selecting gates, circuitry for selecting conductive lines (e.g., theaccess lines 326, the select lines 330, the data lines 322, additionalaccess lines, additional select lines, additional data lines), circuitryfor amplifying signals, and circuitry for sensing signals. In someembodiments, the control unit 336 is at least partially (e.g.,substantially) positioned within horizontal boundaries (e.g., in theX-direction and the Y-direction) of a horizontal area occupied by thevertical strings 319 of memory cells 320. The control unit 336 may, forexample, be electrically coupled to the data lines 322, the sourcestructure 324, the access lines 326, and select lines 330. In someembodiments, the control unit 336 includes CMOS (complementarymetal-oxide-semiconductor) circuitry. In such embodiments, the controlunit 336 may be characterized as having a “CMOS under Array” (“CuA”)configuration.

Thus, in accordance with embodiments of the disclosure, amicroelectronic device comprises a stack structure, a staircasestructure, conductive pad structures, conductive contact structures,data line structures, a source structure, an array of verticallyextending strings of memory cells, access line structures, and a controldevice. The stack structure comprises vertically alternating conductivestructures and insulating structures arranged in tiers. Each of thetiers individually comprises at least one of the conductive structuresand at least one of the insulating structures. The staircase structurehas steps comprising edges of at least some of the tiers of the stackstructure. The conductive pad structures comprise beta phase tungsten onthe steps of the staircase structure. The conductive contact structuresare on the conductive pad structures. The data line structures overliethe stack structure. The source structure underlies the stack structure.The vertically extending strings of memory cells extend through thestack structure and are electrically connected to the source structureand the data line structures. The access line structures areelectrically connected to the conductive contact structures. The controldevice vertically underlies the source structure and is withinhorizontal boundaries of the array of vertically extending strings ofmemory cells. The control device is electrically coupled to the sourcestructure, the data line structures, and the access line structures.

Microelectronic device structures (e.g., the microelectronic devicestructure 100 previously described with reference to FIG. 1K) andmicroelectronic devices (e.g., the microelectronic device 300 previouslydescribed with reference to FIG. 3) in accordance with embodiments ofthe disclosure may be used in embodiments of electronic systems of thedisclosure. For example, FIG. 4 is a block diagram of an illustrativeelectronic system 400 according to embodiments of disclosure. Theelectronic system 400 may comprise, for example, a computer or computerhardware component, a server or other networking hardware component, acellular telephone, a digital camera, a personal digital assistant(PDA), portable media (e.g., music) player, a Wi-Fi or cellular-enabledtablet such as, for example, an iPad® or SURFACE® tablet, an electronicbook, a navigation device, etc. The electronic system 400 includes atleast one memory device 402. The memory device 402 may comprise, forexample, an embodiment of one or more of a microelectronic devicestructure and a microelectronic device previously described herein. Theelectronic system 400 may further include at least one electronic signalprocessor device 404 (often referred to as a “microprocessor”). Theelectronic signal processor device 404 may, optionally, include anembodiment of one or more of a microelectronic device structure and amicroelectronic device previously described herein. While the memorydevice 402 and the electronic signal processor device 404 are depictedas two (2) separate devices in FIG. 4, in additional embodiments, asingle (e.g., only one) memory/processor device having thefunctionalities of the memory device 402 and the electronic signalprocessor device 404 is included in the electronic system 400. In suchembodiments, the memory/processor device may include one or more of amicroelectronic device structure and a microelectronic device previouslydescribed herein. The electronic system 400 may further include one ormore input devices 406 for inputting information into the electronicsystem 400 by a user, such as, for example, a mouse or other pointingdevice, a keyboard, a touchpad, a button, or a control panel. Theelectronic system 400 may further include one or more output devices 408for outputting information (e.g., visual or audio output) to a user suchas, for example, one or more of a monitor, a display, a printer, anaudio output jack, and a speaker. In some embodiments, the input device406 and the output device 408 may comprise a single touchscreen devicethat can be used both to input information to the electronic system 400and to output visual information to a user. The input device 406 and theoutput device 408 may communicate electrically with one or more of thememory device 402 and the electronic signal processor device 404.

Thus, in accordance with embodiments of the disclosure, an electronicsystem comprises an input device, an output device, a processor deviceoperably coupled to the input device and the output device, and a memorydevice operably coupled to the processor device. The memory devicecomprises a microelectronic device structure comprising a stackstructure, a staircase structure, conductive pad structures, andconductive contact structures. The stack structure comprises tiers eachcomprising a conductive structure comprising alpha phase tungsten, andan insulative structure vertically neighboring the conductive structureand comprising a dielectric oxide material. The staircase structure iswithin the stack structure and has steps comprising edges of at leastsome of the tiers. The conductive pad structures are on at least some ofthe steps of the staircase structure and comprise beta phase tungsten.The conductive contact structures are on the conductive pad structures.

The methods, structures (e.g., the microelectronic device structures100, 200, 302), devices (e.g., the microelectronic device 300), andsystems (e.g., the electronic system 400) of the disclosureadvantageously facilitate one or more of improved performance,reliability, and durability, lower costs, increased miniaturization ofcomponents, improved pattern quality, and greater packaging density ascompared to conventional structures, conventional devices, andconventional systems. The methods and structures of the disclosure mayalleviate problems related to the formation and processing ofconventional microelectronic devices including stack structures havingstaircase structures at edges thereof. For example, the methods andstructures of the disclosure may reduce the risk of undesirable damage(e.g., contact structure punch through) to conductive structures (e.g.,the conductive structures 144, 244, 306) of the stack structures (e.g.,the stack structures 142, 242, 304) at steps (e.g., the steps 112, 212,314) of the staircase structures (e.g., the staircase structures 110,210, 312), as well as undesirable current leakage and short circuits ascompared to conventional methods and conventional structures.

While the disclosure is susceptible to various modifications andalternative forms, specific embodiments have been shown by way ofexample in the drawings and have been described in detail herein.However, the disclosure is not limited to the particular formsdisclosed. Rather, the disclosure is to cover all modifications,equivalents, and alternatives falling within the scope of the followingappended claims and their legal equivalents.

What is claimed is:
 1. A microelectronic device, comprising: a stackstructure comprising vertically alternating conductive structures andinsulating structures arranged in tiers, each of the tiers individuallycomprising one of the conductive structures and one of the insulatingstructures; a staircase structure having steps comprising edges of atleast some of the tiers of the stack structure; conductive padstructures on the steps of the staircase structure and comprising betaphase tungsten, at least one of the conductive pad structureshorizontally extending beyond horizontal boundaries of at least one ofthe steps of the staircase structure directly vertically thereunder; andconductive contact structures on the conductive pad structures.
 2. Themicroelectronic device of claim 1, wherein the conductive pad structuresfurther comprise one or more of phosphorus, arsenic, antimony, bismuth,boron, aluminum, gallium, carbon, fluorine, chlorine, bromine, andargon.
 3. The microelectronic device of claim 1, wherein at least amajority of each of the conductive pad structures comprises the betaphase tungsten.
 4. The microelectronic device of claim 1, wherein theconductive structures of the stack structure comprise alpha phasetungsten.
 5. The microelectronic device of claim 1, wherein theconductive pad structures directly physically contact the conductivestructures of the at least some of the tiers of the stack structure atthe steps of the staircase structure.
 6. The microelectronic device ofclaim 1, wherein at least one of the conductive pad structureshorizontally extends past horizontal boundaries of at least one of thesteps of the staircase structure directly vertically thereunder.
 7. Themicroelectronic device of claim 1, wherein a horizontal center of atleast one of the conductive pad structures is offset from a horizontalcenter of at least one of the steps of the staircase structure directlyvertically thereunder.
 8. The microelectronic device of claim 1, whereinthe conductive contact structures are substantially horizontallycentered on the conductive pad structures.
 9. The microelectronic deviceof claim 1, further comprising dielectric spacer structures directlyhorizontally adjacent vertically extending surfaces of the steps of thestaircase structure.
 10. A method of forming a microelectronic device,comprising: forming a microelectronic device structure, themicroelectronic device structure comprising: a stack structurecomprising a vertically alternating sequence of insulative structuresand additional insulative structures arranged in tiers; and a staircasestructure having steps comprising edges of at least some of the tiers ofthe stack structure; forming a doped semiconductive liner material onthe steps of the staircase structure; converting portions of the dopedsemiconductive liner material into a conductive liner materialcomprising beta phase tungsten; removing vertically extending portionsof the conductive liner material to form conductive pad structures onthe steps of the staircase structure, at least one of the conductive padstructures horizontally extending beyond horizontal boundaries of atleast one of the steps of the staircase structure directly verticallythereunder; at least partially replacing the additional insulativestructures of the stack structure with conductive structures; andforming conductive contact structures on the conductive pad structures.11. The method of claim 10, wherein forming a doped semiconductive linermaterial on the steps of the staircase structure comprises: forming asemiconductive liner material over the staircase structure and incontact with the additional insulative structures of the stack structureat the steps of the staircase structure; and doping the semiconductiveliner material with one or more dopants to form the doped semiconductiveliner material, horizontally extending portions of the dopedsemiconductive liner material having relatively greater amounts of theone or more dopants than vertically extending portions of the dopedsemiconductive liner material.
 12. The method of claim 11, whereindoping the semiconductive liner material with one or more dopantscomprises forming the vertically extending portions of the dopedsemiconductive liner material to individually comprise a doped regionand a substantially undoped region horizontally intervening between thedoped region and the staircase structure.
 13. The method of claim 10,wherein converting portions of the doped semiconductive liner materialinto a tungsten liner material comprises forming the conductive linermaterial to further comprise one or more dopants of the dopedsemiconductive liner material.
 14. The method of claim 10, wherein atleast partially replacing the additional insulative structures of thestack structure with conductive structures comprises replacing portionsof the additional insulative structures with alpha phase tungsten toform the conductive structures, at least some of the conductivestructures directly physically contacting the conductive pad structuresat the steps of the staircase structure.
 15. The method of claim 10,further comprising removing remaining portions of the dopedsemiconductive liner material after forming the conductive padstructures.
 16. The method of claim 10, further comprising oxidizingremaining portions of the doped semiconductive liner material to forminsulative spacer structures after forming the conductive padstructures.
 17. A method of forming a microelectronic device,comprising: forming a microelectronic device structure, themicroelectronic device structure comprising: a stack structurecomprising a vertically alternating sequence of insulative structuresand additional insulative structures arranged in tiers; and a staircasestructure having steps comprising edges of at least some of the tiers ofthe stack structure; forming a doped semiconductive liner material overand in contact with at least some of the additional insulativestructures of the stack structure at the steps of the staircasestructure; removing vertically extending portions of the dopedsemiconductive liner material to form discrete semiconductive padstructures over the steps of the staircase structure; converting thediscrete semiconductive pad structures into discrete conductive padstructures comprising beta phase tungsten, at least one of the discreteconductive pad structures horizontally extending beyond horizontalboundaries of at least one of the steps of the staircase structuredirectly vertically thereunder; replacing at least some portions of theadditional insulative structures of the stack structure with conductivestructures; and forming conductive contact structures on the discreteconductive pad structures.
 18. The method of claim 17, wherein forming adoped semiconductive liner material comprises forming the dopedsemiconductive liner material to comprise a silicon material doped withone or more of phosphorus, arsenic, antimony, bismuth, boron, aluminum,gallium, carbon, fluorine, chlorine, bromine, and argon.
 19. The methodof claim 17, wherein removing vertically extending portions of the dopedsemiconductive liner material comprises treating the dopedsemiconductive liner material with at least one etchant that removes thevertically extending portions of the doped semiconductive liner materialfaster than horizontally extending portions of the doped semiconductiveliner material.
 20. The method of claim 17, wherein forming the discreteconductive pad structures comprising beta phase tungsten comprisesforming at least a majority of each of the discrete conductive padstructures to comprise the beta phase tungsten.
 21. The method of claim17, wherein replacing at least some portions of the additionalinsulative structures of the stack structure with conductive structurescomprises forming the conductive structures to comprise tungsten.
 22. Amemory device, comprising: a stack structure comprising verticallyalternating conductive structures and insulating structures arranged intiers, each of the tiers individually comprising at least one of theconductive structures and at least one of the insulating structures; astaircase structure having steps comprising edges of at least some ofthe tiers of the stack structure; conductive pad structures comprisingbeta phase tungsten on the steps of the staircase structure, at leastone of the conductive pad structures horizontally extending beyondhorizontal boundaries of at least one of the steps of the staircasestructure directly vertically thereunder; conductive contact structureson the conductive pad structures; data line structures overlying thestack structure; a source structure underlying the stack structure; anarray of vertically extending strings of memory cells extending throughthe stack structure and electrically connected to the source structureand the data line structures; access line structures electricallyconnected to the conductive contact structures; and a control devicevertically underlying the source structure and within horizontalboundaries of the array of vertically extending strings of memory cells,the control device electrically coupled to the source structure, thedata line structures, and the access line structures.
 23. The memorydevice of claim 22, wherein the conductive pad structures furthercomprise one or more of phosphorus, arsenic, antimony, bismuth, boron,aluminum, gallium, carbon, fluorine, chlorine, bromine, and argon. 24.An electronic system, comprising: an input device; an output device; aprocessor device operably coupled to the input device and the outputdevice; and a memory device operably coupled to the processor device andcomprising at least one microelectronic device structure comprising: astack structure comprising tiers each comprising: a conductive structurecomprising alpha phase tungsten; and an insulative structure verticallyneighboring the conductive structure and comprising a dielectric oxidematerial; a staircase structure within the stack structure and havingsteps comprising edges of at least some of the tiers; conductive padstructures on at least some of the steps of the staircase structure andcomprising beta phase tungsten, at least one of the conductive padstructures horizontally extending beyond horizontal boundaries of atleast one of the steps of the staircase structure directly verticallythereunder; and conductive contact structures on the conductive padstructures.